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ULSI Technology
ULSI Technology
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ISBN 9780071141055
McGraw-Hill Higher Education
Presents topics useful for the next generation of USLI technologies, allowing more transistors to be packaged on a single chip. This book contains contributions from industry experts, specializing in topics such as epitaxy with low temperature process, rapid thermal processes, low damage plasma reactive ion etching, and fine line lithography.
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Product details
BrandMcGraw-Hill Higher Education
Pub dateOct 1, 1996
ISBN-100071141057
ISBN-139780071141055
Contents same as book with ISBN0070630623
ISBN0071141057
Paperback640.0 pages
LanguageEnglish
Last updated 2025-08-10 04:52
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