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Ultra-Clean Technology Handbook: Volume 1: Ultra-Pure Water

Ultra-Clean Technology Handbook: Volume 1: Ultra-Pure Water

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Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules.

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Pub dateJun 30, 2020
ISBN-100367402343
ISBN-139780367402341
LanguageEnglish
Last updated 2026-03-20 10:01
$99.05
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