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Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering
Mems and Microsystems: Design, Manufacture, and Nanoscale Engineering
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ISBN 9780470083017
Aktuell und didaktisch ausgereift, bietet der Band Anwendern und fortgeschrittenen Studierenden einen ausgezeichneten Zugang zu den Themenbereichen MEMS und Mikrosysteme. Berücksichtigt werden sowohl Aspekte der Elektrik und Elektronik als auch die mechanische Seite der MEMS.
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Pub dateMar 1, 2008
ISBN-100470083018
ISBN-139780470083017
LanguageEnglish
Last updated 2026-04-23 03:42
$159.19
$171.95
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