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Glow Discharge Processes Sputtering and Plasma Etching

by [Chapman, Brian]

$257.03

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Description

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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Product Details

  • Wiley-Interscience Brand
  • Sep 25, 1980 Pub Date:
  • 9780471078289 ISBN-13:
  • 047107828X ISBN-10:
  • 432.0 pages Hardcover
  • English Language
  • 9.47 in * 1.29 in * 6.44 in Dimensions:
  • 2 lb Weight: