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Glow Discharge Processes: Sputtering and Plasma Etching

Glow Discharge Processes: Sputtering and Plasma Etching

No customer reviews yet ISBN 9780471078289 Wiley-Interscience

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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BrandWiley-Interscience
Pub dateSep 25, 1980
ISBN-10047107828X
ISBN-139780471078289
Hardcover432.0 pages
LanguageEnglish
Dimensions9.47 × 1.29 × 6.44 in
Weight2 lb
Last updated 2026-04-09 20:17
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