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In this book, RHEED, REM and REELS techniques are comprehensively reviewed for the first time. The text is written to combine basic techniques with special applications, theories with experiments, and the basic physics with materials science, so that a full picture of RHEED and REM emerges. The book is written for materials scientists and graduate students and is entirely self-contained. FORTRAN source codes are provided for calculating crystal structure data and electron energy-loss spectra in different scattering geometries.