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Efficient Extreme Ultra-Violet Mirror Design: An FDTD approach

by Lee, Yen-Min

$194.23

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Description

Efficient Extreme Ultraviolet Mirror Design describes an approach to designing EUV mirrors with reduced computational time and memory requirements, providing a comprehensive grounding in the fundamentals of the EUV mirror and knowledge of the finite-difference time-domain (FDTD) method. It is an essential reference for EUV industry professionals.

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Product Details

  • Iop Publishing Ltd Brand
  • Sep 23, 2021 Pub Date:
  • 9780750326506 ISBN-13:
  • 0750326506 ISBN-10:
  • English Language
  • 10 in * 0.31 in * 7 in Dimensions:
  • 1 lb Weight: