Resonant Network Antennas for Radio-Frequency Plasma Sources: Theory, technology and applications

Resonant antennas are increasingly employed by the plasma industry, and the theory has now developed alongside the technological applications to the extent that it is timely to document the progress in this field to aid antenna design for future novel RF plasma sources. This reference text explains the complete theory of resonant antennas, from fundamental circuits to mutual partial inductance coupling with plasma. It describes industrial applications, and covers state-of-the-art research in helicon wave physics and sources with plasma diagnostics. The book is divided into four parts, covering resonant network antennas without plasma, antennas in magnetized and non-magnetized plasma, and finally, technology and future developments of resonant network antennas.

Key Features

• Explains the complete theory of resonant network antennas in self-consistent detail, from fundamental circuits to mutual partial inductance coupling with plasma
• Describes tried-and-tested industrial applications, with novel technological solutions and design tips
• Covers state-of-the-art research in helicon wave physics and sources with plasma diagnostics
• Includes futuristic configurations such as phase-locked antennas, 2D networks, toroidal sources
• Matlab programs are provided for the most useful and recurring antenna calculations