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Home/ Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices (Softcover Reprint of the Original
Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices (Softcover Reprint of the Original

Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices (Softcover Reprint of the Original

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An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.

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Pub dateMar 31, 1998
ISBN-100792350081
ISBN-139780792350088
LanguageEnglish
Last updated 2026-03-22 18:42
$177.01
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