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Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

by Nonogaki, Saburo
No customer reviews yet ISBN 9780824799519

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

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Pub dateJun 25, 1998
ISBN-100824799518
ISBN-139780824799519
LanguageEnglish
Last updated 2026-07-29 07:01
$439.20
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