MEMS and NEMS: Systems, Devices, and Structures

The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings together the various paradigms, methods, techniques, and technologies associated with MEMS and NEMS in a presentation accessible to a broad audience. Focusing on the basic theory needed to design, develop, analyze, and prototype high-performance devices, components, and structures, it shows how to analyze processes, phenomena, and properties at nano- and micro-scales and illustrates development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.