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Home/ 2001 6th International Symposium on Plasma- And Process-Induced Damage: May 13-15, 2001, Monterey, C
2001 6th International Symposium on Plasma- And Process-Induced Damage: May 13-15, 2001, Monterey, C

2001 6th International Symposium on Plasma- And Process-Induced Damage: May 13-15, 2001, Monterey, C

No customer reviews yet ISBN 9780965157759

This work covers topics such as: damage measurement; plasma characterization and damage mitigation; non-volatile memories; ultra-thin dielectrics; contamination; and multi-terminal effects.

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Pub dateJan 1, 2001
ISBN-10096515775X
ISBN-139780965157759
LanguageEnglish
Last updated 2026-03-10 23:38
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