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Machine Learning-Based Modelling in Atomic Layer Deposition Processes

Machine Learning-Based Modelling in Atomic Layer Deposition Processes

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This book describes the application of machine learning modelling approaches in atomic layer deposition and presents detailed information on modelling, optimization, and prediction of the behaviour and characteristics of ALD for improved process quality control.

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Pub dateMay 6, 2025
ISBN-101032386738
ISBN-139781032386737
LanguageEnglish
Last updated 2026-09-07 16:20
$77.22
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