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Chemical Physics of Thin Film Deposition Processes for Micro- And Nano-Technologies (2002)

Chemical Physics of Thin Film Deposition Processes for Micro- And Nano-Technologies (2002)

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Pub dateApr 30, 2002
ISBN-101402005245
ISBN-139781402005244
LanguageEnglish
Last updated 2026-08-31 03:44
$114.64
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