VLSI Micro- and Nanophotonics: Science, Technology, and Applications

There is a significant difference between VLSI (very large scale integration) micro/nanoelectronics and VLSI micro/nanophotonics. This book is about the latter, which defines photonic devices, circuits, and subsystems of micron, submicron, nano-scale, and quantum-scale dimensions. It examines issues concerning three essential steps in this technology: miniaturization, interconnection, and integration of microphotonic devices, circuits, and systems at micron or submicron scale. It highlights the technology's advantages with respect to size as well as its ability to offer unexplored functions for novel applications.