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Introduction to Focused Ion Beam Nanometrology
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Published
Oct 1, 2015
ISBN-13
9781681740201

Introduction to Focused Ion Beam Nanometrology

by Cox, David C
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This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.

Product details

Pub dateOct 1, 2015
ISBN-101681740206
ISBN-139781681740201
LanguageEnglish
Last updated 2026-04-12 03:59
$104.20
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