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Lithography: Main Techniques
Lithography: Main Techniques
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ISBN 9781848212022
- Published
- Dec 2010
- Language
- English
$187.77
$190.95
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About this book
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Specifications
PublishedDec 20, 2010
ISBN-10184821202X
ISBN-139781848212022
LanguageEnglish
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