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Fabrication of GAAS Devices

by Fabrication of GAAS Devices

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Description

This book provides fundamental and practical information on all aspects of GaAs processing and gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices. This book is suitable for both new and practising engineers.

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Product Details

  • Institute of Electrical E Brand
  • Feb 1, 2023 Pub Date:
  • 9781849190671 ISBN-13:
  • 1849190674 ISBN-10:
  • English Language
  • 9.69 in * 0.77 in * 7.44 in Dimensions:
  • 1 lb Weight: