Chemistry of Atomic Layer Deposition

Ali, Saleem

This volume, titled Proceedings of the International Materials Symposium on Ce- ramic Microstructures: Control at the Atomic Level summarizes the progress that has been achieved during the past decade in understanding and controlling microstructures in ceram- ics. A particular emphasis of the symposium, and therefore of this volume, is advances in the characterization, understanding, and control of micro structures at the atomic or near-atomic level. This symposium is the fourth in a series of meetings, held every ten years, devoted to ceramic microstructures. The inaugural meeting took place in 1966, and focussed on the analysis, significance, and production of microstructure; the symposium emphasized the need for, and importance of characterization in achieving a more complete understanding of the physical and chemical characteristics of ceramics. A consensus emerged at that meeting on the critical importance of characterization in achieving a more complete understanding of ceramic properties. That point of view became widely accepted in the ensuing decade. The second meeting took place in 1976 at a time of world-wide energy shortages and thus emphasized energy-related applications of ceramics, and more specifically, microstructure-property relationships of those materials. The third meeting, held in 1986, was devoted to the role that interfaces played both during processing, and in influencing the ultimate properties of single and polyphase ceramics, and ceramic-metal systems.

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Springer

Sahoo, Susanta Kumar

Mitra, Rahul