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Modelling of Microfabrication Systems (2003)

by Nassar, Raja

$160.95

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Description

This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

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Product Details

  • Jun 13, 2003 Pub Date:
  • 3540002529 ISBN-10:
  • 9783540002529 ISBN-13:
  • English Language
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