Microstructuring of Glasses (2008)

Microstructured glass has become increasingly important for microsystems technology. Its main applications include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators, and implants. Because glass has distinct properties from silicon, PMMA, and metals, there are some applications that can only use glass devices. The main advantages of glass come from its amorphous nature. This is the first book that explains how to structure glass for micro and nanophotonic applications. It deals with various glass compositions and their properties and the interactions between glass and the electromagnetic waves used to modify it. The book also explores methods for influencing the geometrical microstructure of glass as well as methods to produce actual microdevices.