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Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technolo

Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technolo

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Pub dateMay 28, 1991
ISBN-103540539549
ISBN-139783540539544
LanguageEnglish
Last updated 2026-08-29 02:49
$57.47
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