Home/Introduction to VLSI Process Engineering (Softcover Reprint of the Original 1st 1993)
Introduction to VLSI Process Engineering (Softcover Reprint of the Original 1st 1993)
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Integrated circuits are finding ever wider applications through a range of industries. Introduction to VLSI Process Engineering presents the design principles for devices, describes the overall VLSI process, and deals with the essential manufacturing technologies and inspection procedures.